Femtosecond Laser Direct Patterning of Sensing Materials Toward Flexible Integration of Micronanosensors.

Li Guo,Hong Xia,Hui-Tao Fan,Yong-Lai Zhang,Qi-Dai Chen,Tong Zhang,Hong-Bo Sun
DOI: https://doi.org/10.1364/ol.35.001695
2010-01-01
Abstract:Reported is femtosecond laser direct patterning of sensing materials toward flexible integration of micronanosensors (FIMS), meaning the capability to fabricate multiple functional sensors of smaller size on a nonflat surface of a substrate that is not limited to silicon. As a representative example, a photosensitive SnO(2) colloidal solution (sol) was developed, from which complex micronanostructures were written via a two-photon absorption process. After thermal decomposition of organic components, the patterned SnO(2) microsensors responded to relative humidity (RH) with a variation range of 5 orders of magnitude. FIMS would open a new door for miniaturization of micronanosensors expected in intelligent microsystems.
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