Femtosecond laser micro-fabricated flexible sensor arrays for simultaneous mechanical and thermal stimuli detection

Ruijie Bai,Yang Gao,Cong Lu,Jianping Tan,Fuzhen Xuan

DOI: https://doi.org/10.1016/j.measurement.2020.108348

IF: 5.6

2021-02-01

Measurement

Abstract:<p>Flexible sensor matrix with functionalities for multiple stimuli detection has prospect applications in structural health monitoring, internet of things, soft robotics, etc.. However, fabrication of the sensor matrix in a simple, highly efficient, and scalable manner is still a challenge. To address this, a femtosecond (fs) laser micro-fabrication method is developed to fabricate a sensor matrix integrated with temperature and pressure sensor arrays. Through the programmable control of laser irradiation manner including scanning velocity, laser power, and laser irradiation intervals, the temperature and pressure sensor arrays were fabricated by the fs laser . The temperature sensors have a temperature coefficient of resistance of -0.52%/^oC, higher than commercial temperature sensor based on platinum. The pressure sensors deliver a sensitivity of -2.01 kPa^-1, a response speed of 0.030 s, a detection window from 0.001-80 kPa, and high mechanical stability. When the fs laser micro-fabricated pressure and temperature sensor arrays are integrated together, the sensor matrix could simultaneously detect external mechanical and thermal stimuli.</p>

engineering, multidisciplinary,instruments & instrumentation

What problem does this paper attempt to address?

This paper aims to address the issue of how to manufacture multifunctional flexible sensor matrices capable of simultaneously detecting mechanical and thermal stimuli in a simple, efficient, and scalable manner. To solve this problem, researchers developed a femtosecond laser microfabrication (fs-LMF) method for manufacturing flexible sensor matrices with integrated temperature and pressure sensor arrays in open air. This method achieves efficient manufacturing of temperature and pressure sensor arrays by programmatically controlling the laser irradiation parameters (including scanning speed, laser power, and laser irradiation intervals). The fabricated sensors exhibit high sensitivity and response speed, demonstrating potential applications in fields such as structural health monitoring, the Internet of Things, and soft robotics.