High‐Performance Flexible Pressure Sensor Based on Controllable Hierarchical Microstructures by Laser Scribing for Wearable Electronics

Qifeng Du,Lanlan Liu,Ruitao Tang,Jun Ai,Zhijian Wang,Qiqi Fu,Chongxiao Li,Ying Chen,Xue Feng

DOI: https://doi.org/10.1002/admt.202100122

IF: 6.8

2021-06-20

Advanced Materials Technologies

Abstract:<p>Flexible pressure sensors are attracting considerable attention due to their potential applications in human health monitoring and human-machine interfaces. However, it is hard to achieve both high sensitivity and wide linear detection range, and the complicated fabrication process restricts their practical applications. Herein, a simple and scalable fabrication process for a flexible pressure sensor with high sensitivity and wide detection range has been developed by combining the silver nanowires coated, laser-ablated hierarchical microstructured polydimethylsiloxane, and an interdigital electrode. The hierarchical microstructures contribute to the high sensitivity of 4.48 kPa⁻¹ and increase detection range from 0 to 65 kPa. The increase in the contact area and subsequent additional contact sites of the hierarchical microstructures lead to the high-performance. Arterial pulse, breathing, and static tremors have been measured by attaching the device to the human body. Moreover, a pressure sensor array has been fabricated to illustrate the scalability of this strategy. The results demonstrate that the flexible pressure sensor with simple and scalable fabrication capability has promising applications in wearable electronic skins.</p>

materials science, multidisciplinary

What problem does this paper attempt to address?

The problem that this paper attempts to solve is how to simultaneously achieve high sensitivity and a wide linear detection range in the design and manufacture of flexible pressure sensors. Currently, although significant progress has been made in improving the sensitivity of flexible pressure sensors, it remains a major challenge to expand their linear detection range while maintaining high sensitivity. This is because as the pressure increases, the conductive path will saturate rapidly, limiting the linear measurement range of the sensor. Therefore, the paper proposes a new strategy to create controllable hierarchical micro - structures on polydimethylsiloxane (PDMS) by laser writing technology and combine it with a silver nanowire coating to improve the performance of the sensor. This method not only improves the sensitivity of the sensor but also expands its linear detection range, thus resolving the above - mentioned contradiction.

Specifically, the paper shows that this sensor has a sensitivity as high as 4.48 kPa\(^{-1}\) (in the pressure range from 0 to 22 kPa) and a sensitivity of 0.86 kPa\(^{-1}\) in the pressure range from 27 to 65 kPa. In addition, the sensor also exhibits a fast response time (less than 7 milliseconds) and excellent reliability over more than 1,000 cycles. These characteristics make the sensor very suitable for monitoring human physiological signals such as pulse, respiration and static tremor, and are also suitable for constructing wearable electronic skin and human - machine interaction interfaces.