Skin-inspired flexible pressure sensor with hierarchical interlocked spinosum microstructure by laser direct writing for high sensitivity and large linearity

Longsheng Lu,Yihe Zhao,Na Lin,Yingxi Xie

DOI: https://doi.org/10.1016/j.sna.2023.114988

IF: 4.291

2024-01-08

Sensors and Actuators A Physical

Abstract:Recently, wearable pressure sensors have attracted tremendous attention due to their potential applications in human motion and health monitoring. However, the preparation process of widely used microstructure pressure sensors is complex, and the trade-off between high sensitivity and wide linearity is hard to achieve, which restricts their practical applications. Herein, inspired by the geometry of the skin epidermis, this paper proposes a flexible piezoresistive sensor with hierarchical interlocked spinosum microstructure by laser direct writing technology with scalability, high efficiency, and strong controllability. Due to the hierarchical interlocked structure and gradient stiffness, the pressure sensor with a spinosum microstructure has a sensitivity of up to 68.3 kPa −1 in a wide linear range of 0–13.5 kPa and exhibits a good durability (10000 cycles). Human health signals such as pulse, arm bending, and leg movements have been monitored in real-time by attaching the pressure sensor to the human body. In addition, a rehabilitation device integrating various sensors was also developed to illustrate the scalability of this strategy. The hierarchical interlocked spinosum microstructure makes the flexible pressure sensor have broad application prospects in wearable electronic devices.

engineering, electrical & electronic,instruments & instrumentation