Two-dimensional Laser Interferometric Encoder for the Soft X-ray Scanning Microscope at the NSLS

D SHU,DP SIDDONS,H RARBACK,J KIRZ
DOI: https://doi.org/10.1016/0168-9002(88)90403-2
1988-01-01
Abstract:A two-dimensional laser interferometric encoder for the scanning soft X-ray microscope has been developed and tested at the NSLS mini-undulator beamline X-17T. The instrument is designed to provide a resolution of 316 Å within the 3 mm range of the stage, and to permit scanning speeds up to 3 mm/s. The accuracy of the indicated position is limited by the low-cost laser used, but is more than adequate for scan lengths used in typical experiments (∼ 50 μm). We present here the optical and electronic design features.
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