Abstract:Driven by life-science applications, mega-electron-volt Scanning Transmission Electron Microscope (MeV-STEM) has been proposed to image thick biological samples. The high penetration of inelastic scattering signals of MeV electrons could make the MeV-STEM an appropriate microscope for biological samples as thick as 10 {\mu}m or more with a nanoscale resolution, considering the effect of electron energy, beam broadening and low-dose limit on resolution. The best resolution is inversely related to the sample thickness and changes from 6 nm to 24 nm when the sample thickness increases from 1 {\mu}m to 10 {\mu}m. To achieve such a resolution in STEM, the imaging electrons must be focused on the specimen with a nm size and a mrad semi-convergence angle. This requires an electron beam emittance of a few picometer, which is ~1,000 times smaller than the presently achieved nm emittance, in conjunction with less than 10-4 energy spread and 1 nA current. We numerically simulated two different approaches that are potentially applicable to build a compact MeV-STEM instrument: 1) DC gun, aperture, Superconducting radio frequency (SRF) cavities, and STEM column; 2) SRF gun, aperture, SRF cavities, and STEM column. Beam dynamic simulations show promising results, which meet the needs of an MeV-STEM, a few picometer emittance, less than 10-4 energy spread, and 0.1-1 nA current from both options. Also, we designed a compact STEM column based on permanent quadrupole quintuplet not only to demagnify the beam size from 1 {\mu}m at the source point to 2 nm at the specimen, but also to provide the freedom of changing the magnifications at the specimen and a scanning system to raster the electron beam across the sample with a step size of 2 nm and the repetition rate of 1 MHz. This makes it possible to build a compact MeV-STEM and use it to study thick, large-volume samples in cell biology.

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