Development and Calibration of Standards for the Coating Thickness in the Range of Micrometer and Nanometer

KP Hoffmann,T Ahbe,K Herrmann,K Hasche,E Pohlenz,J Sun
DOI: https://doi.org/10.1016/s0257-8972(03)00213-5
IF: 4.865
2003-01-01
Surface and Coatings Technology
Abstract:PTB carries out investigations to develop, manufacture and calibrate reference standards for the coating thickness in the range from approximately 10 nm to 50 μm. The fundamental measurements ensuring the traceability to internationally accepted metrological standards are made by scanning electron microscopy and scanning force microscopy. Examples of standards are presented. The manufacture of sets of standards for practical applications is in preparation.
What problem does this paper attempt to address?