Abstract:Carbon nitride films were deposited on Co/Ni-covered Si(100) wafers at room temperature using a dc glow discharge plasma beam deposition method. The glow discharge has been carried out in a mixed gas of nitrogen and methane in different relative proportions and has maintained stable in an glow operating pressure around 30Torr. Scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy and Raman spectroscopy were carried out to investigate morphology, composition, structure and crystallinity of the as-deposited films. In scanning electron microscopy images, the as-deposited films consist of crystallites with an average size of about 20–30nm, and an interesting cauliflower structure is found in the center of a prepared sample. The X-ray diffraction results indicate that β- and graphitic-C3N4 crystallites and CNx or carbon nanotubes exist in the as-deposited films. The X-ray photoelectron spectroscopy results show that the [N]/[C] ratios are 0.34–0.46 and the peak shapes and intensities in the N 1s and C 1s regions are similar to those previously reported by our research group using the atom-beam assisted pulsed laser deposition method. The Raman spectra show two separated characteristic bands: a disordered D band (around 1323cm−1) that indicates the presence of C3N4 components, and a graphitic G band (around 1593cm−1). The impacts of the substrate temperatures, nitrogen/methane pressure ratios and Co/Ni layer thicknesses on the properties of the as-deposited films are discussed.

Raman spectral study on the carbon nitride film synthesized on a nitridated diamond surface by nitrogen-arc-discharge-assisted laser ablation deposition

Raman Spectroscopy on the Beta-C3n4 Structure Formed by Low-Energy Nitrogen Ion Implantation into A Diamond Surface

Investigation of carbon nitride films by cathodic arc evaporation

Raman Spectra Of Nanocrystalline Carbon Nitride Synthesized On Cobalt-Covered Substrate By Nitrogen-Atom-Beam-Assisted Pulsed Laser Ablation

Synthesis of Carbon Nitride Films by Arc-Heated Atomic Nitrogen Beams Assisted Pulsed Laser Ablation

Carbon Nitride Films Synthesized By Combined Ion-Beam And Laser-Ablation Processing

Electronic and Mechanical-Properties of Carbon Nitride Films Prepared by Laser-Ablation Graphite under Nitrogen Ion-Beam Bombardment

Carbon nitride films on diamond layers and their thermal behavior

Raman Characteristics of Hard Carbon-Nitride Films Deposited by Reactive Ionized Cluster Beam Techniques

Carbon nitride films synthesized by the reactive ionized cluster beam technique

Characteristics of Carbon Nitride Films Synthesized by Single-Source Ion Beam Enhanced Deposition System

Phases and Physical Properties of Carbon Nitride Thin Films Prepared by Pulsed Laser Deposition

Synthesis of Carbon Nitride Nanocrystals on Co/Ni-covered Substrate by Nitrogen-Atom-beam-assisted Pulsed Laser Ablation

Synthesis of C3N4+ by the Combination of Laser Ablation of Graphite and N2 Molecular Beam

Synthesis of Nanocrystalline Carbon Nitride Films by Glow Discharge Plasma Beam Deposition

Optical & Electronic Properties of Carbon Nitride Thin Films

Deposition of crystalline C3N4 films via microwave plasma chemical vapour deposition

Investigations on Structural Properties of Carbon Nitride Films Synthesized by Reactive Ionized Cluster Beam Deposition

Preparation of Crystalline Carbon Nitride Films on Silicon Substrate by Chemical Vapor Deposition

Carbon Nitride Films Synthesized By Nh3-Ion-Beam-Assisted Deposition

Probing Carbon Nanoparticles in Cnx Thin Films Using Raman Spectroscopy