Development of Novel Chemical Field-effect Transistor Humidity Sensor Array

Tai Huiling,Xie Guangzhong,Jiang Yadong
DOI: https://doi.org/10.13382/j.jemi.2007.03.022
2007-01-01
JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT
Abstract:Multilayer ultrathin film of Baytron P/PDDA was fabricated by self-assembly (SA) method using Baytron P as sensitive material. A novel humidity sensor array was implemented, which consists of 4 gateless chemical field-effect transistors (chemFET), and the obtained Baytron P/PDDA SA film was used to replace the gate metal of conventional MOSFET. The humidity sensitive property of the chemFET sensor was examined. A generalized regression neural network (GRNN) was designed for humidity prediction. The result shows that the best prediction result with the minimum relative error of 1.77% is obtained while using the drain current response at the drain-source bias of 1V as the inputs of the network and the spread constant is 0.14.
What problem does this paper attempt to address?