Abstract:pH sensors based on a nanostructured ion-sensitive field-effect transistor have characteristics such as fast response, high sensitivity and miniaturization, and they have been widely used in biomedicine, food detection and disease monitoring. However, their performance is affected by many factors, such as gate dielectric material, channel material and channel thickness. In order to obtain a pH sensor with high sensitivity and fast response, it is necessary to determine the appropriate equipment parameters, which have high processing cost and long production time. In this study, a nanostructured ion-sensitive field-effect transistor was developed based on the SILVACO technology computer-aided design (TCAD) simulator. Through experiments, we analyzed the effects of the gate dielectric material, channel material and channel thickness on the electrical characteristics of the nanostructured field-effect transistor. Based on simulation results, silicon nitride was selected as the gate dielectric layer, while indium oxide was chosen as the channel layer. The structure and parameters of the dual channel ion-sensitive field-effect transistor were determined and discussed in detail. Finally, according to the simulation results, a pH sensor based on the nanostructured ion-sensitive field-effect transistor was fabricated. The accuracy of simulation results was verified by measuring the output, transfer and pH characteristics of the device. The fabricated pH sensor had a subthreshold swing as low as 143.19 mV/dec and obtained an actual sensitivity of 88.125 mV/pH. In addition, we also tested the oxidation reaction of hydrogen peroxide catalyzed by horseradish peroxidase, and the sensitivity was up to 144.26 pA mol(-1) L-1, verifying that the ion-sensitive field-effect transistor (ISFET) can be used to detect the pH of micro solution, and then combine the enzyme-linked assay to detect the concentration of protein, DNA, biochemical substances, biomarkers, etc.

Fabrication Of Integrated Chemical Field-Effect Transistor Humidity Sensor Array And Signal Processing Using Artificial Neural Network

Development of Novel Chemical Field-effect Transistor Humidity Sensor Array

Study on ChemFET NO 2 Gas Sensor Array

An Artificial Neural Network Model for Electro-Thermal Effect Affected Hot Carrier Injection Reliability in 14-nm FinFETs

Humidity Sensor Synaptic Device Based on Bilayer p–n Heterojunction Transistors for Maintaining Humidity Homeostasis

Ion Gel Coated Graphene Field Effect Transistor for Humidity Sensing Applications

Fabrication and NO 2 Sensing Properties of ChemFET Sensors with Self-Assembly PAN/PSSA Sensitive Films Based on Nano-Au Surface

Fabrication and Characterization of ChemFET Ammonia Gas Sensor

Semiconducting single-walled carbon nanotube network-based double-gate thin-film transistors for high-performance aqueous chemical sensor applications

Branched Polyethylenimine-Based Field Effect Transistor for Low Humidity Detection at Room Temperature

Carbon Nanotube Field-Effect Transistor Based Ph Sensors

Carbon Nanotube-Based Field-Effect Transistor-Type Sensor with a Sensing Gate for Ppb-Level Formaldehyde Detection

Field Effect Transistor Sensors Based on In‐Plane 1T′/2H/1T′ MoTe2 Heterophases with Superior Sensitivity and Output Signals

On the Capacitive-to-Resistive Humidity Response of Polyelectrolyte-Gated Metal Oxide Transistors

Extended-Gate Structure for Carbon-Based Field Effect Transistor Type Formaldehyde Gas Sensor

Humidity sensing properties of a single Sb doped SnO2 nanowire field effect transistor

Electrolyte-Gated Graphene Field Effect Transistor-Based Ca2+ Detection Aided by Machine Learning

Two-dimensional Nanomaterial-Based Field-Effect Transistors for Chemical and Biological Sensing

Multiwalled Carbon Nanotube-N-Doped Graphene/Poly(3,4-ethylenedioxythiophene):Poly(styrenesulfonate) Nanohybrid for Electrochemical Application in Intelligent Sensors and Supercapacitors

Design And Implementation Of A Ph Sensor For Micro Solution Based On Nanostructured Ion-Sensitive Field-Effect Transistor

Flexible Humidity Sensor based on PEDOT: PSS/Mxene Nanocomposite