Integration of semiconductor readout circuits and superconductor THz detectors

Xu Qinyin,Chen Jian,Kang Lin,Wu Peiheng
DOI: https://doi.org/10.3969/j.issn.2095-2783.2013.04.005
2013-01-01
Abstract:In order to reduce system noise and improve system sensitivity,stability and speed of large format 2-dimensional(2D) arrays for terahertz(THz) detectors,high sensitivity superconductor THz detectors integrated with low noise cryogenic semiconductor readout circuits were designed.The superconductor THz direct detectors were fabricated by Nb/Al/AlOX/Al/Nb tunnel junctions and the readout circuits were fabricated by n-type GaAs JFETs.Thereby,the superconductor and semiconductor devices were integrated in the same chip so that thin film wires can replace the cables or bonding wires in the traditional process.To get better coupling,this integrated chip was deigned to be a circular shape with a diameter of 12 mm,so that the antenna of the detector can set in the center of the Si hyper-hemispherical lens.
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