Experimental Study on Direct Nitridation of Silicon by Thermorgravimetry

万金雄,程乐鸣,杨春,朱茜茜,骆仲泱
DOI: https://doi.org/10.3969/j.issn.1004-3950.2011.04.001
2011-01-01
Energy Engineering
Abstract:The effects of temperature and particle size on conversion rate of Si3N4 were studied by TG in which silicon particles of three different size were used,and the products were analyzed using XRD method to acquire the conversion rate curve of nitridation.The results indicated that silicon and nitrogen reacted at 1000~1100℃,and then the reaction developed into kinetic control process which lasted 5~10 minutes with quick reaction.Finally,the reaction was controlled by the diffusion of nitrogen with slow reaction rate.The results also showed that a smaller size of raw material and a higher temperature of the nitridation process had a positive impact on enhancing the conversion rate,while the oxide layer on the silicon particles had an impediment to nitridation.Silicon particles 2.5 μm in size reached conversion rate of α-Si3N4 up to 75% and the total conversion rate 90% at 1350℃.
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