Study of Low-Frequency Excess Noise in Gan Thin Films Deposited by Rf-Mbe on Intermediate-Temperature Buffer Layers

BH Leung,WK Fong,CF Zhu,C Surya
DOI: https://doi.org/10.1109/16.954483
2001-01-01
Abstract:Low-frequency excess noise was measured in a series of GaN epitaxial films deposited by RF-plasma assisted molecular beam epitaxy (MBE). The GaN epitaxial layers were grown on double buffer layers, each consisting of an intermediate-temperature buffer layer (ITBL) deposited at 690/spl deg/C and a conventional low-temperature buffer layer grown at 500/spl deg/C. The Hooge parameters for the as-grown films were found to depend on the thickness of ITBL with a minimum value of 7.34/spl times/10/sup -2/ for an optimal ITBL thickness of 800 nm. The observed improvements in the noise properties are attributed to the relaxation of residual strain within the material, leading to a corresponding reduction in crystalline defects.
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