The Signal Detection for the Levitated Rotor Micro Gyroscope

Huang Xiaogang,Chen Wenyuan,Liu Wu,Zhang Weiping,Wu Xiaosheng
DOI: https://doi.org/10.1088/1742-6596/34/1/129
2006-01-01
Journal of Physics Conference Series
Abstract:In the novel prototype of micro gyroscope structure, the new configured capacitance sensing scheme for the micro gyroscope is analyzed and the virtual instrument based detection scheme is implemented. The digital lock-in amplifier is employed in the capacitance detection to restrain the noise interference. The capacitance analysis shows that 1000aF capacitance variation corresponds to 0.1 degree of the turn angle. The differential capacitance bridge and the charge integral amplifier are used as the front signal input interface. In the implementation of digital lock-in amplifier, a new routine which warranted the exactly matching of the reference phase to signal phase was proposed. The result of the experiment shows that digital lock-in amplifier can greatly eliminate the noise in the output signal. The linearity of the turn angle output is 2.3% and the minimum resolution of turn angle is 0.04 degree. The application of the digital lock-in amplifier in the field of micro-electro-mechanical-system (MEMS) device signal detection is a new attempt, and it shows the prospective for a high-performance application.
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