Progress of Micro-tribology Measuring Technology

Li Xiaobing,Liu Ying,Guo Jilin,Zhou Shunbin
2006-01-01
Abstract:With the progress of MEMS,especially micro-tribology,it is very important of micro-tribology measuring technology.The progress and actuality of researching micro-tribology measuring technology was summed up,and some micro-tribology testing apparatus based on strain gauge,pressure sensor,electromagnetism micro-motor,silicon micro-machine,buoyant force,optical measurement were presented,and their work principles and characteristics were analyzed.
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