Research Progress of GaN-based LED on Silicon

洪炜,朱丽萍,叶志镇,唐海平,倪贤锋,赵浙
DOI: https://doi.org/10.3321/j.issn:1005-023x.2005.01.028
2005-01-01
Abstract:GaN/Si based devices are of great interest because the silicon substrate has superior properties, such as low-cost,high thermal conductivity,potential applications in the integration of the microelectronics and opto- electronics,mature technology in growth of Si single crystal with large diameter.However,the large thermal mis- match between GaN and Si leads to the formation of cracks in the epitaxial GaN films,which is a major problem in fabricating LEDs and other structure of electronic devices.Recently,the GaN quality has improved drastically with the development of technique.Some groups have succeeded in manufacturing LED on silicon.In this paper,the crack- ing problems of GaN film and research progress of GaN-based LED on Si are outlined.
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