Abstract:In recent years, the femtosecond laser becomes a promising tool to fabricate 3D microstructures for their applications in micro-optics, microfluidics and biofabrication. Various femtosecond-laser-based processes have been used for machining high-precise microstructures with arbitrary shapes. However, the efficiency problem of the femtosecond laser micro-fabrication has hindered its practical applications. Here we present a simple, high-efficient maskless technique to fabricate 3D microstructures on glasses using a femtosecond laser wet etch (FLWE) process. In the FLWE process, the ultrafast laser delivers intensity and time-controlled, programmable arranged, individual pulses to a glass chip. The sample is then subjected to wet-etch processing. The laser pulses change the physical and chemical properties of the glass in the focal spots, and the wet-etch processing that follows carves out a unique 3D microstructures array pattern. Using this method, we fabricated microlens with the diameter: 80 ��m, height: 6.7 ��m and surface roughness: less than 10 nm. We fabricated microstructures on glass surface like microlens arrays with different characteristics like high-fill ratio, high-aspect ratio, controllable shape and arrange, and so on. We also fabricated microstructures like spiral microchannels inside glasses using the FLWE process. The diameter of the spiral microchannel is 20 ��m, and the length-diameter ratio is more than 100. These 3D microchannels will be served as the alternatives of the 2D microstructures in the conventional microfluidic devices.

Photoetching of spherical microlenses on glasses using a femtosecond laser

Fabrication of 3d Microoptical Lenses in Photosensitive Glass Using Femtosecond Laser Micromachining

Fabrication of Optical Microlenses in Glass Using a Femtosecond Laser for LBA-on-a-Chip Applications

Fabrication of Microlens Arrays in Photosensitive Glass by Femtosecond Laser Direct Writing

Micro-nano fabrication of femtosecond laser wet etch

Convex Silica Microlens Arrays Via Femtosecond Laser Writing.

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Direct Fabrication of Microlens Arrays on PMMA with Laser-Induced Structural Modification

Fabrication of the Asymmetric Double-Sided Concave Microlens Arrays by Femtosecond Laser

Single-pulse Writing of a Concave Microlens Array.

Optical Nanofabrication of Concave Microlens Arrays

Progress In Femtosecond Laser Fabrication Of Microlens Array With Spatial Light Modulators

Maskless Fabrication Of Concave Microlens Arrays On Silica Glasses By A Femtosecond-Laser-Enhanced Local Wet Etching Method

Femtosecond Laser Fabrication of Submillimeter Microlens Arrays with Tunable Numerical Apertures

Rapid fabrication of large-area concave microlens arrays on PDMS by a femtosecond laser

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Scalable Shape-Controlled Fabrication of Curved Microstructures Using a Femtosecond Laser Wet-Etching Process

Direct Fabrication of Compound-Eye Microlens Array on Curved Surfaces by a Facile Femtosecond Laser Enhanced Wet Etching Process

Rapid Fabrication of Cylindrical Microlens Array by Shaped Femtosecond Laser Direct Writing

Lens-on-lens Microstructures.

Facile and Flexible Fabrication of Gapless Microlens Arrays Using A Femtosecond Laser Microfabrication and Replication Process