Abstract:Abstract Nitrides, carbides, and carbonitrides of transition metal elements like Zr, W, Ti, etc. are generally employed to produce hard coatings. Zirconium-based hard coatings have shown useful applications in the areas of tribology, biomedicine and electrical due to their high thermal stability, hardness, biocompatibility, good erosion, wear, and corrosion resistance. In this study, we created homogeneous and tenacious nanostructured hard coatings based on Zr with good mechanical properties. The magnetron sputter deposition technique was utilized to coat stainless steel 316L substrates with multilayers of Zr/ZrN and ZrN/ZrCN with individual layer thicknesses of 250 and 500 nm for each coating composition. The deposition conditions were adjusted to create two different coating thicknesses of 2 and 3 μm. The thickness of the coating was confirmed using Calotest and the coatings’ morphology and elemental composition were determined utilizing the atomic force microscope and scanning electron microscope equipped with energy dispersive x-ray spectrometer. Coating thickness and adhesion were measured using cross-sectional samples and XRD was utilized to analyze the coatings structure. Nanoindenter was employed to determine the instrumental nanoindentation hardness and elastic modulus. The influence of coating thickness on tribological behavior was further investigated using the ratio of nanohardness-to-elastic modulus (H/E). No evidence of decohesion was observed at the substrate/coatings interface, and the grains of all the coatings were observed to show columnar growth which were homogeneous, compact and dense. The grains of the ZrN/ZrCN coatings were observed to be denser, finer and more compact compared to those of the Zr/ZrN coatings. Correspondingly, higher hardness, modulus and H/E values were exhibited by ZrN/ZrCN than Zr/ZrN coatings. This suggests that the ZrN/ZrCN coatings are capable of exhibiting better wear resistance and fracture toughness. The coatings developed in this investigation are anticipated to be suitable for applications in tribology due to their excellent hardness and H/E properties.

Improvement of Interfacial and Microstructure Properties of High-K ZrO2 Thin Films Fabricated by Filtered Cathodic Arc Deposition Using Nitrogen Incorporation

Enhanced Dielectric Properties of ZrO2thin Films Prepared in Nitrogen Ambient by Pulsed Laser Deposition

Mechanical Properties Of Zirconia Thin Films Deposited By Filtered Cathodic Vacuum Arc

A New Reactive Pulsed Laser Ablation Technique for the Deposition of Hard Carbon and Carbon-Nitride Thin Films

Reducing the oxygen contamination in conductive (Ti,Zr)N coatings via RF-bias assisted reactive sputtering

Microstructure and Young's Modulus of ZrN Thin Film Prepared by Dual Ion Beam Sputtering Deposition

Influence of Protection Layers on Thermal Stability of Nitride Thin Films

Growth and Interface Structures of Zr/Nb Films and Si(110) Substrate

Characterization and modification of carbon nitride films deposited by laser ablation under low energy ion‐beam bombardment

Tailoring Zr-N Thin Film Characteristics on Ti-6Al-4 V Alloy: Effect of Nitrogen and Bias Voltage

Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films

The Surface Modification of ZrO2 Film by Zr/Nb Ion Implantation and First-Principles Calculation

Interfacial Properties of High-K Dielectric Cazrox Films Deposited by Pulsed Laser Deposition

Deposition, microstructure and nanoindentation of multilayer Zr nitride and carbonitride nanostructured coatings

Effect of depositing parameters on microstructures and properties of multi arc ion plating ZrTiN films

Effect of C2h2 Flow Rate on the Deposition of Zr-Zrc-Zrc/Dlc Gradient Nano-Composite Film on Biomedical Niti Alloy

Structure, Composition and Mechanical Properties of Reactively Sputtered (tivcrtaw)nx High-Entropy Films

Structure and Dielectric Property of High-k ZrO2 Films Grown by Atomic Layer Deposition Using Tetrakis(Dimethylamido)Zirconium and Ozone

Characterization of microstructure and surface properties of GLC film deposited in plasma nitriding system

Synthesis, composition, surface roughness and mechanical properties of thin nitrogenated carbon films

XPS Study on Interfacial Properties Between ZrN Diffusion Barrier Layer and SiCON Low-k Dielectric Film