Abstract:Ceramic surface microstructuring is a rapidly growing field with a variety of applications in tribology, wetting, biology, and so on. However, there are limitations to large-area microstructuring and fabrication of three-dimensional (3D) micro free forms. Here, we present a route to obtain intricate surface structures through in situ slip casting using polydimethylsiloxane (PDMS) negative molds which are replicated from excimer laser ablated polycarbonate (PC) master molds. PC sheets are ablated with a nanosecond KrF (λ = 248 nm) excimer laser mask projection system to obtain micron-scale 3D surface features over a large area of up to 3 m(2). Complex surface structures that include 3D free forms such as 3D topography of Switzerland, shallow structures such as diffractive optical elements (60 nm step) and conical micropillars have been obtained. The samples are defect-free produced with thicknesses of up to 10 mm and 120 mm diameter. The drying process of the slip cast alumina slurry takes place as a one-dimensional process, through surface evaporation and water permeation through the PDMS membrane. This allows homogeneous one-dimensional shrinkage during the drying process, independent of the sample's lateral dimensions. A linear mass diffusion model has been proposed to predict and explain the drying process of these ceramic colloidal suspensions. The calculated drying time is linearly proportional to the height of the slurry and the thickness of the negatively structured PDMS and is validated by the experimental results. An experimentally observed optimum Sylgard PDMS thickness range of ∼400 μm to 1 mm has achieved the best quality microstructured green compacts. Further, the model predicts that the drying time is independent of the microstructured areas and was validated using experimental observations carried out with microstructured areas of 300 mm(2), 1200 mm(2), and 120 cm(2). Therefore, in principle, the structures can be further replicated in areas up to 3 m(2) with the same drying time for the same slurry height. The surface-structured ceramics display interesting wetting properties, for example, eicosane-coated mesoporous microstructured alumina shows superhydrophobic behavior. Additionally, ceramic bulk samples could be further used as second-generation very hard and low-wear molds for further microfabrication.

A Net-Shape Fabrication Process of Alumina Micro-Components Using a Soft Lithography Technique

A soft lithography process for manufacture of alumina micro-components

Preparation of concentrated aqueous alumina suspensions for soft-molding microfabrication

Fabrication of Ni-Al2o3 Composite Microcomponent by Electroforming

Improvements in the structural integrity of green ceramic microcomponents by a modified soft moulding process

Fabrication of the Similar Porous Alumina Silicon Template for Soft UV Nanoimprint Lithography

High-precision and Rapid Layerless Printing Technology for High-Solid and Low-Viscosity Alumina Slurry

Micropatterning of fine scale ceramic structures

Microelectroforming of freestanding metallic microcomponents using silver-coated poly(dimethylsiloxane) molds

Fabrication of MEMS components using ultrafine-grained aluminium alloys

Surface 3D Micro Free Forms: Multifunctional Microstructured Mesoporous α-Alumina by in Situ Slip Casting Using Excimer Laser Ablated Polycarbonate Molds

Fabrication of alumina ceramics with high flexural strength using stereolithography

Controlled Fabrication of Porous Al2O3 Ceramic by N,N′-dimethylformamide-based Gel-Casting

Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process

Mechanical modification of PDMS by blending with nano particles as hot embossing mold

Fabrication of Su-8 Moulds on Glass Substrates by Using A Common Thin Negative Photoresist As an Adhesive Layer

3D printing of dense structural ceramic microcomponents with low cost: Tailoring the sintering kinetics and the microstructure evolution

Study on Fabrication of Ceramic Micro-device

Fabrication of Micro/nano Fluidic System Combining Hybrid Mask-Mould Lithography with Thermal Bonding

Study of alumina ceramic parts fabricated via DLP stereolithography using powders with different sizes and morphologies

Fabrication of injection moulded translucent alumina ceramics via pressureless sintering