Study on Fabrication of Ceramic Micro-device

Jun WANG,Gang LIU,Ying XIONG,Yu-hua GUO,Xue-ling ZHU,Yang-chao TIAN
2006-01-01
Abstract:A new method of producing high precision Al ceramic micro-device with a high aspect ratio was described. The PMMA mold with a microstructure was fabricated using synchronous radiation lithography. After the ceramic powder was embossed by the mold and it was resolved to form the blank, the blank was sintered at 1700°C to form the ceramic micro-device. By the method, a ceramic micro-device with width of 30 μm and height of 400 μm is fabricated. Simultaneously, the method can also be applied for the primary development of the ceramic micro-reactor and realization of processing of the ceramic micro-channels.
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