Micropatterning of fine scale ceramic structures

B. Su,D. Zhang,T. W. Button
DOI: https://doi.org/10.1023/a:1016198009368
IF: 4.5
2002-01-01
Journal of Materials Science
Abstract:We report a method which combines colloidal processing with polymer mould for the net shape fabrication of fine scale ceramic structures with feature sizes in the micrometer range and aspect ratios up to 10. Both soft and solid polymer moulds have been used, which can be made using lithography, laser micromachining or CNC machining. Fine scale ceramic structures are formed via embossing, moulding and casting. Polymer moulds are removed using either chemical or mechanical methods depending on the aspect ratio and feature size of the fine scale ceramic structures. Some fine scale ceramic structures have been demonstrated in examples such as PZT microrod arrays and alumina microgears.
materials science, multidisciplinary
What problem does this paper attempt to address?