A Hybrid 3D Quantum Mechanical Simulation of FinFETs and Nanowire Devices

Xue Shao,Zhiping Yu
DOI: https://doi.org/10.1007/978-3-7091-0624-2_5
2004-01-01
Abstract:In this paper, we have carried out a numerical simulation of FinFETs. The model is based on ID non-equilibrium Green's function (NEGF) along the channel and 2-D Schrodinger equation in the confined cross section and provides insights into the performance of FinFETs with ultra small channel cross section. The simulation results of FinFETs show normal I-V characteristics with great potential in scalability even when the gate length is below 5 nm with 2-by-2 nm channel cross section.
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