Performance enhancement of nanotube junctionless FETs with low doping concentration rings
Liang Wang,Wanyang Xiao,Yueyang Wang,YongLin Bai,Zirui Wang,Jie Xu,Min Tang,Qiuxiang Zhang,weijing liu,Wei Bai,Xiaodong Tang
DOI: https://doi.org/10.1088/1361-6641/ad5042
IF: 2.048
2024-05-25
Semiconductor Science and Technology
Abstract:To reduce the static power consumption of the NT JLFET and the effect of SCEs on the NT JLFET, A nanotube junctionless field effect transistor with cyclic low doping concentration regions (C NT JLFET) is proposed. Based on Sentaurus TCAD numerical simulations, the electrical properties of the C NT JLFET and the NT JLFET were comparatively investigated, and the effects of the length (L CD ) and radius (R CD ) of cyclic low doping concentration regions on the electrical properties of the C NT JLFETs were studied. The C NT JLFET reduces the gate-induced drain leakage (GIDL) due to lateral band-to-band-tunneling (L-BTBT) as compared to the NT JLFET. As the L CD or R CD increases, the off-state current decreases. In addition, the C NT JLFET suffers from fewer short channel effects (SCEs), such as threshold voltage roll-off, drain-induced barrier lowering and subthreshold swing deterioration, compared to the NT JLFET. The inhibition of L-BTBT and attenuation of SCEs by cyclic low doping concentration regions remains when the channel length of the C NT JLFET is shortened to 10 nm. The C NT JLFET are suitable for low power applications as they exhibit reduced L-BTBT and suffer from fewer SCEs.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter