ZrO2 thin films and ZrO2/SiO2 optical reflection filters deposited by sol–gel method

Qinyuan Zhang,Xiaoli Li,Jun Shen,Guangming Wu,Jue Wang,Lingyan Chen
DOI: https://doi.org/10.1016/S0167-577X(00)00124-5
IF: 3
2000-01-01
Materials Letters
Abstract:ZrO2 thin films were deposited by a wet chemical sol–gel method from forced hydrolysis of aqueous ZrOCl2 solution. Transmission electron microscopic observations confirmed the existence of little nanosized monoclinic ZrO2 particles in clear stable ethanolic ZrO2 colloidal suspensions. Twenty layers of ZrO2/SiO2 high reflectance filters using a quarterwave stack were fabricated by sol–gel spin-coating on K9 glass substrate. This filter exhibits a wide reflectance band near 1064 nm and a high transmittance region.
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