Analysis and characterization of nanostructure out-of-plane vibrations using micro laser doppler

XU Lin-yan,LI Da-chao,QIU Han,HU Xiao-tang,ZHAO Da-bo
DOI: https://doi.org/10.3321/j.issn:1005-0086.2008.06.016
2008-01-01
Abstract:The theory and method of nanostructure out-of-plane vibration measurement technique based on micro laser Doppler are expounded.The test system for nanostructure out-of-plane vibration based on Doppler vibrometer is set up.For the characterization of the vibration properties of NEMS representative device electrostatic-actuated nanobeam,three key models are established:the equivalent electrical model of electrostatic-actuated nanobeam,the equivalent mechanical model of nanobeam,the correlation model of electrostatic force on the electrostatic-actuated nanobeam and electrostatic actuator.The out-of-plane vibration of the electrostatic-actuated nanobeam is studied using the nanostructure out-of-plane vibration measurement system based on Micro Laser Doppler.The experimental results are well anastomotic with the built models,and estimate NEMS process.
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