Nonlinear Vibration Analysis of MEMS Micro-Beam Structure Acting by Multi-Couplings Factors

Dengwei Huang,Shoujian Li,Changping Chen,Liming Dai
DOI: https://doi.org/10.1115/imece2011-62898
2011-01-01
Abstract:In this paper, the nonlinear vibration characteristics of the micro-beam structure acting by multi-couplings factors are investigated. Taking the nonlinear air damping force, alternating voltage excitation as well as the geometric nonlinearity of the micro-beam into account, the nonlinear vibration governing equations of the micro-beam are derived on the basis of the Euler-Bernoulli beam theory. The Galerkin method and harmonic balance method are adopted to obtain the amplitude-frequency response characteristic and phase-frequency response characteristic of the micro-beam structure. Then the effects of the nonlinear air damping force and the geometric nonlinearity on the resonance frequency and stiffness of micro-beam structure are analyzed.
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