Characterization of Nanoscale Vibration Using Tapping Mode AFM

徐临燕,栗大超,刘瑞鹏,邱晗,傅星,胡小唐,张文栋
DOI: https://doi.org/10.3969/j.issn.1004-2474.2010.04.044
2010-01-01
Abstract:Aimed at solving the problems of indirect measurement,low resolution and low bandwidth existing in the methods applied to the nano-vibration measurement,a vibration system model of the interaction between the probe and the vibration sample under the tapping-mode AFM has been established.Runge-Kutta numerical method is used to analyze the feasibility and the bandwidth of AFM vibration measuring technique.Taking fixed-fixed nanobeam resonator under the electrostatic actuation as the measured sample,the out-of-plane amplitude frequency response characteristics are measured under the tapping mode AFM.Meanwhile the comparison testing is carried out by the micro-laser Doppler vibrometer,and the accordant results are gained.The frequency speciality of vibration measurement error of tapping mode AFM is related with the measured frequency of the sample.
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