Characterization of the vibration behavior of nanobeam-resonator using AFM dynamic mode

Linyan Xu,DaChao Li,Xing Fu,Xiaotang Hu
2011-01-01
Abstract:Aimed at solving the disadvantages of indirect measurement, low resolution and low bandwidth existing in electrical and optical methods applied in nano-vibration measurement, dynamic atomic force microscope (AFM) of tapping mode and tapping force-curve mode is adopted. The theory modal of dynamic AFM under vibration surface is set up, while Runge-Kutta numerical method is used to analyze the feasibility and the bandwidth of AFM vibration measuring technique. Taking fixed-fixed nanobeam resonator under electrostatic actuation as a measured sample, its out-of-plane amplitude frequency response characteristics is measured using tapping mode and tapping force-curve mode of AFM. Meanwhile the comparison testing is carried out by micro-laser Doppler (MicroLD) vibrometer. Taking the experimental results from MicroLD vibrometer as the benchmark, the resonance frequency from AFM dynamic mode is 1.73 MHz equally, and the deviation of peak vibration amplitude is less than-1.6%.
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