Formation of Pd silicides and periodicity in sputtered Pd/Si nanometric multilayers

Liwen Wu,Lingyun Zhou,Bing Wang,Chen Gao,Wenhan Liu,Ziqin Wu
DOI: https://doi.org/10.1016/0038-1098(94)90655-6
IF: 1.934
1994-01-01
Solid State Communications
Abstract:X-ray diffraction (XRD) has been used to study the formation of Pd silicides and periodicity in sputtered Pd/Si nanometric multilayers. Both Pd2Si and PdSi have been found in as-deposited Pd/Si multilayers with small periods (about 1 approximately 5nm), but only Pd2Si in the case of larger periods. No small angle XRD peak in samples with periods smaller than 2.6nm indicates that there is no periodicity in these samples. It means that roughness of Pd/Si interfaces can reach about 2.0nm and is related to the Pd silicides formation.
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