Abstract:<p>An experimental study is conducted to investigate the multi-length scale evolution from micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the effects of laser polarization and the number of scans on the periodic features and the micro/nano-structures. It is found that the evolution from micro/nano-structural arrays to V-grooves is gradual as the laser fluence, scan speed or the number of scans is increased. Laser-induced surface instability, hatching effects, Coulomb explosions, melting, and evaporation are found to be the underlying mechanisms for the micro/nano structural formation. As the laser fluence increases, the agglomerated nanoparticles change from sparse to dense, so that the boundary between the LIPSS (laser-induced periodic surface structures) becomes less obvious. The oxygen (O) elements attached to the surface of nanoparticles increase with an increase in laser fluence. A high-spatial-frequency LIPSS (HSFL) can transform to low-spatial-frequency LIPSS (LSFL) as the laser fluence excesses the ablation threshold, while the spatial period of the HSFL and LSFL is independent of fluence. It is shown that the irradiated surface evolves from a near-damage-free zone to one with a recast layer and thermal-induced micro-cracks, defined as heat-affected zones (HAZ). Near thermal damage-free micro/nano-structural arrays with different orientations on the sidewalls of the grooves are fabricated at close to the laser ablation threshold by multi-pass scanning. A self-organizing model is developed which shows that laser polarization leads to the asymmetry of energy distribution and the structural array is arranged along the main direction of energy flow. The model analysis shows a good agreement with experimental results and provides an efficient means to understand the interaction between femtosecond laser and silicon carbide (SiC).</p>

Formation and Partial Recovery of Optically Induced Local Dislocations Inside CaF_2 Single Crystal

Self-Formation Of Quasiperiodic Void Structure In Caf2 Induced By Femtosecond Laser Irradiation

Theoretical and experimental study on femtosecond laser induced damage in CaF<sub>2</sub> crystals

KrF excimer laser induced damage and its mechanism of CaF2 single crystal with (1 1 1), (1 1 0) and (1 0 0) planes

Formation of Nanostructures Induced by Capillary-Discharge Soft X-ray Laser on BaF2 Surfaces

Laser-induced Periodic Annular Surface Structures on Fused Silica Surface

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

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One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Optical Modulation Study of Repaired Damage Morphologies of Fused Silica by Scalar Diffraction Theory

Effect of Crystallographic Orientation on Structural Response of Silicon to Femtosecond Laser Irradiation

Formation of diversiform microstructures in wide-bandgap materials by tight-focusing femtosecond laser pulses

Fabrication of Microstructures in Lif Crystals by A Femtosecond Laser

Near-Infrared Femtosecond Laser Induced Defect Formation in High Purity Silica below the Optical Breakdown Threshold

Microstructures Induced by Femtosecond Laser Pulses Inside Glasses

Femtosecond Laser Writing of Er^3+-doped CaF_2 Crystalline Patterns in Glass

Femtosecond Laser-Induced Inverted Microstructures Inside Glasses by Tuning Refractive Index of Objective's Immersion Liquid.

Optically Produced Cross Patterning Based on Local Dislocations Inside Mgo Single Crystals

Evolution of Microstructures on Silicon Induced by Femtosecond Laser with Multiple Pulses

Random Lasing Emission and Oscillation in Femtosecond Laser Machined Microstructured Nd3+-doped (pb, La)(Zr, Ti)O3 (10/65/35) Ceramics

Scan Speed and Fluence Effects in Femtosecond Laser Induced Micro/nano-Structures on the Surface of Fused Silica