Abstract:In this paper, a line-scanning irradiation of <0001> 6H-SiC single crystal by a femtosecond laser focus was implemented for laser fluence of 2.2 J/cm 2 at different scanning velocities from 1000 down to 100 μm/s. The morphology of the obtained ablation lines characterized by a scanning electron microscope shows that there progressively appear three-level ripples with average period of about 222, 600 nm and that between them. Possible formation mechanisms for these three-level ripples were analyzed by numerical simulation employing finite-difference time-domain method (FDTD). Analysis shows that as Obara proposed, the interference of incident wave with the wave scattered by scratches possibly left by fine polishing is the most possible reason for inducing 222 nm-period and 600 nm-period ripples. Main discussions were focused on the orientation characteristics of ripples. Both isolated scratches and crossed scratches with different orientation angles were considered for evaluating their role in field redistribution. The detailed simulations indicate that for scratches oriented 90° with respect to laser polarization generate a pair of strongest ripple-like optical field enhancement compared to scratches with other orientation angles. It is these advantages of 90°-oriented scratch in field enhancement that make the final ripple perpendicular to laser polarization most competitive and finally left on the surface. This complements the physical picture of Obara et al. in terms of their negligence in addressing the orientation characteristics of ripples. Further FDTD simulation of the interaction of incident wave with as-formed 600 nm-period ripples shows that the optical field enhancement located between any two adjacent 600 nm-period ripples is the driving force for splitting 600 nm-period ripples into the third ripples with period between 222 and 600 nm.

KrF excimer laser induced damage and its mechanism of CaF2 single crystal with (1 1 1), (1 1 0) and (1 0 0) planes

Damage characteristics of 193 nm laser irradiated on MgF2 window

Formation and Partial Recovery of Optically Induced Local Dislocations Inside CaF_2 Single Crystal

Analysis of damage threshold of K9 glass irradiated by 248-nm KrF excimer laser

Surface damage evolution of KDP crystals induced by conical cracks under irradiation of nanosecond laser

KrF Laser-Induced Nanometer Si Crystallites Formation and Tem Observation

Laser-induced damage and defect analysis of calcium fluoride window caused by the high pulse repetition rate of ArF excimer laser radiation

Effect of Crystallographic Orientation on Structural Response of Silicon to Femtosecond Laser Irradiation

Numerical and experimental study on the thermal damage of thin Cr films induced by excimer laser irradiation

KrF-excimer Laser Irradiation on the Soda-Lime Silicate Glass

Thermodynamic damage behavior of single-crystal MgF2 irradiated by high-power fiber laser

Modeling of excimer laser ablation of silicon carbide

Combining laser-induced fluorescence and light-scattering microscopies to diagnose low-fluence damage precursors on KDP-based crystal surface

One-Step femtosecond laser irradiation of Single-Crystal Silicon: Evolution of Micro-Nano structures and damage investigation

Effect of Different Etching Processes on Surface Defects of Quartz Crystals

Fabrication of Internal Diffraction Gratings in Calcium Fluoride Crystals by a Focused Femtosecond Laser

The Three-Level Ripples Induced by Femtosecond Laser on a 6H-Sic Single Crystal and the Formation Mechanism

ArF laser-induced damage of calcium fluoride windows with protected anti-reflection coatings

Pulsed HF/DF Laser Damage in Window Materials.

Molecular dynamics study of the potential formation thickness of ultrafast laser induced sapphire crystal surface recast layer

Femtosecond laser ablation of crystals SiO2 and YAG