Performance Analysis of Dual-Chamber Pneumatic Vibration Isolator

徐登峰,朱煜,尤政,贾松涛
DOI: https://doi.org/10.3969/j.issn.1000-3835.2009.09.036
2009-01-01
Abstract:Vibration isolator can insulate or weaken vibration from the ground or load and it helps to ensure the desired ultimate precision. Therefore,vibration isolator has been widely applied in lots of subsystems which are used in the field of ultra-precision machining,inspection and optics. Among most of vibration isolators,pneumatic vibration isolator is very popular due to its high cost-efficiency ratio and its natural frequency doesn't depend on the load. Based on C. Erin's study,orifice number as a parameter was introduced and the theoretical model of air bearing through derivation was improved. Then,Structural parameters of chamber,orifice and piston were analyzed to assist structural optimal design. Meanwhile,it was concluded that if the length of orifice was unchanged,decreasing the diameter of orifice and increasing the number of orifice would provide better damping effect. Finally,the theoretical analysis results were verified by experiments. This study laid the foundation for in-depth study on passive and active vibration isolator in the future.
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