Abstract:The obtention of quantum-grade rare-earth doped oxide thin films that can be integrated with optical cavities and microwave resonators is of great interest for the development of scalable quantum devices. Among the different growth methods, Chemical Vapour Deposition (CVD) offers high flexibility and has demonstrated the ability to produce oxide films hosting rare-earth ions with narrow linewidths. However, growing epitaxial films directly on silicon is challenging by CVD due to a native amorphous oxide layer formation at the interface. In this manuscript, we investigate the CVD growth of erbium-doped yttrium oxide (Er:Y2O3) thin films on different substrates, including silicon, sapphire, quartz or yttria stabilized zirconia (YSZ). Alternatively, growth was also attempted on an epitaxial Y2O3 template layer on Si (111) prepared by molecular beam epitaxy (MBE) in order to circumvent the issue of the amorphous interlayer. We found that the substrate impacts the film morphology and the crystalline orientations, with different textures observed for the CVD film on the MBE-oxide/Si template (111) and epitaxial growth on YSZ (001). In terms of optical properties, Er3+ ions exhibit visible and IR emission features that are comparable for all samples, indicating a high-quality local crystalline environment regardless of the substrate. Our approach opens interesting prospects to integrate such films into scalable devices for optical quantum technologies.

Hydrothermal deposition of cerium hydroxycarbonate thin films on glass

Changes in the structural and optical properties of CeO2 nanocrystalline films: Effect of film thickness

Investigation of Growth, Structural and Optical Properties of CeO2 Nanocrystalline Thin Films Prepared by Pulsed Spray-Evaporation Chemical Vapor Deposition (PSE-CVD)

Hydrothermal crystal growth and characterization of cerium hydroxycarbonates

Biomolecule-assisted synthesis of rare earth hydroxycarbonates

Preparation of cerium hydroxycarbonate by a surfactant-assisted route

Ce Basic Hydroxycarbonate Complexe As Precursor for Mesoporous Ceria: Synthesis and Characterization

Crystalline Lanthanum Hydroxycarbonates with Controlled Phases and Varied Morphologies Prepared on Non-Crystalline Substrates

Shape-controlled synthesis of CeOHCO3 and CeO2 microstructures

Preparation and Characterization of Ceria-Zirconia Ceramics Using a Sol-Gel Process

Preparation of Ceric Hydroxide Through Transformation of Cerium Compounds

Hydrothermal deposition and characterization of ultrafine ZrO2 thin films

Growth orientation and surface morphology of CeO2 films for high-Jc YBCO films on biaxially-textured Ni tape by PLD

Principle and Process Window of Cerium Dioxide Thin Film Fabrication with Dual Plasma Deposition

A novel dual-phase high-entropy (La0.2Nd0.2Gd0.2Er0.2Yb0.2)2Zr2O7 ceramic for thermal barrier coatings applications: Preparation, microstructure, and thermo–physical properties

Erbium doped yttrium oxide thin films grown by chemical vapour deposition for quantum technologies

Strain Evolution and Morphological Transition of Magnetron-Sputtered CeO2 Thin Films Induced by Deposition Parameters

Synthesis and Characterization of Ceo2 Thin Film with Well-Ordered Step Edges

Hydrothermal synthesis of CeO2 nano-particles

Preparation of transparent and hydrophobic cerium oxide films with stable mechanical properties by magnetron sputtering

Synthesis of Hierarchical Layered Quasi-Triangular Ce(OH)CO3 and Its Thermal Conversion to Ceria with High Polishing Performance