Preparation of transparent and hydrophobic cerium oxide films with stable mechanical properties by magnetron sputtering

Dapeng Zhu,Xiangyang Tan,Lianze Ji,Zhen Shi,Xuefeng Zhang
DOI: https://doi.org/10.1016/j.vacuum.2020.109888
IF: 4
2021-02-01
Vacuum
Abstract:<p>Transparent and hydrophobic cerium oxide films with stable mechanical properties were deposited onto glass substrates by magnetron sputtering technique. It is found that the water contact angle increases with the increase of the roughness and decrease of excessive surface lattice oxygen. Under the synergistic effect of the two factors, the water contact angle can reach 109.4° when the roughness and oxygen concentration are 3.18 nm and 14%, respectively. Meanwhile, the film can reach a highly optical transmittance of 84.0% at 550 nm wavelength. Moreover, the stable mechanical property could protect the film surface from solid particle bombardment, tape peeling and linear abrasion. The results make the practical applications of transparent hydrophobic film with stable mechanical properties in our daily life more feasible.</p>
materials science, multidisciplinary,physics, applied
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