Abstract:Laser-induced plasma micromachining (LIPMM) can be used to fabricate high-quality microstructures of hard and brittle materials. The liquid medium of the LIPMM process plays a key role in inducing the plasma and cooling the materials, but the liquid medium is overheated which induces lots of bubbles to defocus the laser beam and reduce machining stability. In this paper, a comparative investigation on bubble behavior and its effect on the surface integrity of microchannels in three types of liquids and at different depths during LIPMM has been presented. Firstly, the formation mechanism of microbubbles was described. Secondly, a series of experiments were conducted to study the number and maximum diameter of the attached bubbles and the buoyancy movement of floating bubbles in the LIPMM of single-crystal silicon under deionized water, absolute ethyl alcohol, and 5.6 mol/L phosphoric acid solution with a liquid layer depth of 1–5 mm. It was revealed that the number and maximum diameter of attached bubbles in deionized water were the highest due to its high tension. Different from the continuous rising of bubbles at the tail of the microchannels in the other two liquids, microbubbles in 5.6 mol/L phosphoric acid solution with high viscosity rose intermittently, which formed a large area of bubble barrier to seriously affect the laser focus, resulting in a discontinuous microchannel with an unablated segment of 26.31 μm. When the depth of the liquid layer was 4 mm, absolute ethyl alcohol showed the advantages in narrow width (27.15 μm), large depth (16.5 μm), and uniform depth profile of the microchannel by LIPMM. This was because microbubbles in the anhydrous ethanol quickly and explosively spread towards the edge of the laser processing zone to reduce the bubble interference. This research contributes to a better understanding of the behavior and influence of bubbles in different liquid media and depths in LIPMM of single-crystal silicon.

Breakdown Model of Micro Channels Fabrication in Fused Silica Substrates by Laser-Induced Plasma

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Dynamics of filamentary damage induced by nanosecond laser in fused silica

Femtosecond Laser Pulse-Train Induced Breakdown in Fused Silica: the Role of Seed Electrons

Fabrication of fluidic submicron-channels by pulsed laser-induced buckling of SiOx films on fused silica

Subwavelength periodic plasma structures formed during the laser-pulse-induced breakdown within the transparent dielectric

Study on damage characteristics of fused silica glass induced by plasma shock wave with finite element method

Micron-size bubble defects in fused silica and its laser induced damage near 355 nm

Mechanisms In Fs-Laser Ablation In Fused Silica

Modeling of excimer laser ablation of silicon carbide

Influences of Optical Breakdown on Stimulated Brillouin Scattering

Comparative Analysis of Bubbles Behavior in Different Liquids by Laser-Induced Plasma Micromachining Single-Crystal Silicon

Different Tendencies of Breakdown Threshold on Pulse Duration in the Subpicosecond Regime in Fused Silica

Single-pulse femtosecond laser ablation of monocrystalline silicon: A modeling and experimental study

Laser-Induced Bubble Dynamics Optimization for High-Aspect-Ratio 3D Micro-Fluidic Channels Fabrication

Research on breakdown threshold and directivity of sound field generated by ultrashort laser pulses induced liquid breakdown

Fabrication of millimeter-scale deep microchannels in fused silica by femtosecond laser filamentation effect

Characterization of artificial indentation defects in fused silica surface and its damage performance under 355 nm nanosecond laser

Insight on the regulation mechanism of the nanochannels in hard and brittle materials induced by sparially shaped femtosecond laser

Enhancing the Expansion of a Plasma Shockwave by Crater-Induced Laser Refocusing in Femtosecond Laser Ablation of Fused Silica

Laser cutting sandwich structure glass–silicon–glass wafer with laser induced thermal–crack propagation