Study on excimer laser-induced electrochemical etching metal

Xiong Liang-cai
2008-01-01
Optical Technique
Abstract:In order to further understand behavior of laser-induced electrochemical etching process,the experiments of micromachining metal by laser-induced electrochemical etching are carried out.The 248nm excimer laser is adopted as light source.Based on the results of experiments,the technics characteristic of laser electrochemical etching is researched by comparing and analyzing the basic etching appearances of metal and silicon.It is verified that compound technics is made up of laser etching and laser photothermal effect which helps to induce electrochemical dissolution.The laser enhanced photothermal process roots in laser photothermal effect,the shock of laser-induced shock-wave to liquid and material,and micro stirring.
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