Abstract:Copper (Cu) is an important interconnect metal material in the semiconductor field. While removing excess copper in the chemical mechanical polishing process, it is necessary to add corrosion inhibitors to the slurry to protect copper from excessive corrosion. Numerous studies have shown that the heteroatoms and functional groups of corrosion inhibitors are crucial factors affecting their corrosion inhibition ability. The corrosion inhibition performance of benzimidazole (BI) and its two derivatives, 5-methyl benzimidazole (MBI) and 5-methyl benzotriazole (MBTA), on copper in glycine + N-methylglycine solution at pH 9 was studied, and their structure-activity relationship was revealed. Electrochemical measurements and adsorption isotherm fittings show that the three corrosion inhibitors cover the copper surface mainly through the chemisorption to prevent the anodic reaction of copper. The corrosion inhibition efficiencies of BI, MBI, and MBTA were 97.22%, 98.00% and 98.73% at the concentration of 8 mM, respectively, reaching their maximum values. The contact angle testing reveals that MBI and MBTA containing methyl groups are relatively more hydrophobic. X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and scanning electron microscope (SEM) results confirm that the three corrosion inhibitors were successfully adsorbed on the copper surface and formed a dense passivation film to protect the copper from corrosive solutions. In addition, a multi-module collaboration with density functional theory (DFT) and molecular dynamics (MD), further demonstrates that BI, MBI, and MBTA are all adsorbed on the copper layer in a mixed way, and MBTA has the strongest binding capacity to copper. The introduction of the methyl and N atom increased the adsorption area and attachment sites between the corrosion inhibitor and copper, which coincides with the experimental results.

The Formation of an Effective Anti-Corrosion Film on Copper Surfaces from 2-Mercaptobenzimidazole Solution

Interfacial bonding and corrosion inhibition of 2-mercaptobenzimidazole organic films formed on copper surfaces under electrochemical control in acidic chloride solution

Molecular scale insights into interaction mechanisms between organic inhibitor film and copper

The Formation of a Compact Polymer Film on a Copper Electrode from Benzimidazole Solution

Surface Structure and Anti-Corrosion Properties of Copper Treated by A Dopamine-Assisted 11-Mercaptoundecanoic Acid Film

A Sulphuric Solution Inhibitor Containing Dithiocarbamate and Its Anti-corrosion Effect on Copper

A Research Combined Theory with Experiment of 2-Amino-6-(methylsulfonyl)benzothiazole As an Excellent Corrosion Inhibitor for Copper in H2SO4 Medium

Preparation and anti-corrosion performances of grass-like microstructured superhydrophobic surface on copper via solution-immersion

Fabrication and anti-corrosion property of superhydrophobic hybrid film on copper surface and its formation mechanism

Enhancing the corrosion inhibition of copper sheets in oil-in-water (O/W) emulsions by combining two organic heterocyclic derivatives

Corrosion inhibition effect of benzimidazole and two derivatives on copper in alkaline environments: experimental and theoretical analyses

Atomic Scale Insight into Corrosion Inhibition: DFT Study of 2-Mercaptobenzimidazole on Locally De-Passivated Copper Surfaces

Anti-corrosion Performance of Covalent Layer-by-layer Assembled Films Via Click Chemistry Reaction on the Copper Surface

Influence of Hydrolysis Time on the Structure and Corrosion Protective Performance of (3-Mercaptopropyl)triethoxysilane Film on Copper

Corrosion Resistance of Copper Surface Modified With(3-Mercaptopropyl) Trimethoxysilane in NaOH Solution

Surface-enhanced Raman Scattering and Cyclic Voltammetry Studies of Synergetic Effects in the Corrosion Inhibition of Copper by Polybenzimidazole and Mercaptobenzimidazole at High Temperature

Preparation of Superhydrophobic Film on Copper Substrate and Its Anticorrosion Behaviors under Dry/wet Alternative Environment

Copper Corrosion Inhibition by Combined Effect of Inhibitor and Passive Film in Alkaline Solution

Corrosion Protection of Copper by Self-Assembled Monolayers Modified in Aqueous Micellar Solution

Fabricated Super-Hydrophobic Film with Potentiostatic Electrolysis Method on Copper for Corrosion Protection

Self-assembled super-hydrophobic multilayer films with corrosion resistance on copper substrate