Abstract:Copper (Cu) is an important interconnect metal material in the semiconductor field. While removing excess copper in the chemical mechanical polishing process, it is necessary to add corrosion inhibitors to the slurry to protect copper from excessive corrosion. Numerous studies have shown that the heteroatoms and functional groups of corrosion inhibitors are crucial factors affecting their corrosion inhibition ability. The corrosion inhibition performance of benzimidazole (BI) and its two derivatives, 5-methyl benzimidazole (MBI) and 5-methyl benzotriazole (MBTA), on copper in glycine + N-methylglycine solution at pH 9 was studied, and their structure-activity relationship was revealed. Electrochemical measurements and adsorption isotherm fittings show that the three corrosion inhibitors cover the copper surface mainly through the chemisorption to prevent the anodic reaction of copper. The corrosion inhibition efficiencies of BI, MBI, and MBTA were 97.22%, 98.00% and 98.73% at the concentration of 8 mM, respectively, reaching their maximum values. The contact angle testing reveals that MBI and MBTA containing methyl groups are relatively more hydrophobic. X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and scanning electron microscope (SEM) results confirm that the three corrosion inhibitors were successfully adsorbed on the copper surface and formed a dense passivation film to protect the copper from corrosive solutions. In addition, a multi-module collaboration with density functional theory (DFT) and molecular dynamics (MD), further demonstrates that BI, MBI, and MBTA are all adsorbed on the copper layer in a mixed way, and MBTA has the strongest binding capacity to copper. The introduction of the methyl and N atom increased the adsorption area and attachment sites between the corrosion inhibitor and copper, which coincides with the experimental results.

Surface-enhanced Raman Scattering and Cyclic Voltammetry Studies of Synergetic Effects in the Corrosion Inhibition of Copper by Polybenzimidazole and Mercaptobenzimidazole at High Temperature

SERS studies of synergetic effect in corrosion inhibition for Cu by a two-component inhibitor system of polyvinylimidazole and benzimidazole

Surface‐enhanced Raman Scattering Study of Polymer on Metals. III. Chemisorbed Polybenzimidazole and Its Corrosion‐inhibiting Properties at High Temperature

Corrosion inhibition effect of benzimidazole and two derivatives on copper in alkaline environments: experimental and theoretical analyses

Atomic Scale Insight into Corrosion Inhibition: DFT Study of 2-Mercaptobenzimidazole on Locally De-Passivated Copper Surfaces

Interfacial bonding and corrosion inhibition of 2-mercaptobenzimidazole organic films formed on copper surfaces under electrochemical control in acidic chloride solution

Synergistic inhibition of azoles compounds on chloride-induced atmospheric corrosion of copper: Experimental and theoretical characterization

The Formation of an Effective Anti-Corrosion Film on Copper Surfaces from 2-Mercaptobenzimidazole Solution

Investigation of Corrosion Inhibitor Adsorption on Mica and Mild Steel Using Electrochemical Atomic Force Microscopy and Molecular Simulations

Experimental and Molecular Simulation Studies of N, S-doped Carbon Dots as an Eco-friendly Corrosion Inhibitor for Protecting Cu in HCl Environment

Experimental and theoretical study of 2-mercaptopyridine as an effective eco-friendly inhibitor for copper in aqueous NaCl

Temporal Aspects of Corrosion Inhibition on Copper, Silver, and Copper-Silver Alloy: An Electrochemical Impedance Spectroscopy Study

Enhancing the corrosion inhibition of copper sheets in oil-in-water (O/W) emulsions by combining two organic heterocyclic derivatives

Molecular scale insights into interaction mechanisms between organic inhibitor film and copper

Investigation of Inhibition of 2-Mercaptobenzoxazole for Copper Corrosion

Surface functionalization of Cu–Ni alloys via grafting of a bactericidal polymer for inhibiting biocorrosion by Desulfovibrio desulfuricans in anaerobic seawater

Theoretical and electrochemical analysis on inhibition effects of benzotriazole derivatives (un- and methyl) on copper surface

Experimental and Theoretical Study on the Synergistic Inhibition Effect of Pyridine Derivatives and Sulfur-Containing Compounds on the Corrosion of Carbon Steel in CO2-Saturated 3.5 wt.% NaCl Solution

Experimental and Theoretical Study on the Synergistic Inhibition Effect of Pyridine Derivatives and Sulfur-Containing Compounds on the Corrosion of Carbon Steel in CO₂-Saturated 3.5 wt.% NaCl Solution

Surface Modification of Copper for Adhesion Promotion by Polybenzimidazole

Benzothiazole derivatives-based supramolecular assemblies as efficient corrosion inhibitors for copper in artificial seawater: Formation, interfacial release and protective mechanisms