Abstract:Copper (Cu) is an important interconnect metal material in the semiconductor field. While removing excess copper in the chemical mechanical polishing process, it is necessary to add corrosion inhibitors to the slurry to protect copper from excessive corrosion. Numerous studies have shown that the heteroatoms and functional groups of corrosion inhibitors are crucial factors affecting their corrosion inhibition ability. The corrosion inhibition performance of benzimidazole (BI) and its two derivatives, 5-methyl benzimidazole (MBI) and 5-methyl benzotriazole (MBTA), on copper in glycine + N-methylglycine solution at pH 9 was studied, and their structure-activity relationship was revealed. Electrochemical measurements and adsorption isotherm fittings show that the three corrosion inhibitors cover the copper surface mainly through the chemisorption to prevent the anodic reaction of copper. The corrosion inhibition efficiencies of BI, MBI, and MBTA were 97.22%, 98.00% and 98.73% at the concentration of 8 mM, respectively, reaching their maximum values. The contact angle testing reveals that MBI and MBTA containing methyl groups are relatively more hydrophobic. X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM) and scanning electron microscope (SEM) results confirm that the three corrosion inhibitors were successfully adsorbed on the copper surface and formed a dense passivation film to protect the copper from corrosive solutions. In addition, a multi-module collaboration with density functional theory (DFT) and molecular dynamics (MD), further demonstrates that BI, MBI, and MBTA are all adsorbed on the copper layer in a mixed way, and MBTA has the strongest binding capacity to copper. The introduction of the methyl and N atom increased the adsorption area and attachment sites between the corrosion inhibitor and copper, which coincides with the experimental results.

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Molecular scale insights into interaction mechanisms between organic inhibitor film and copper

Interfacial bonding and corrosion inhibition of 2-mercaptobenzimidazole organic films formed on copper surfaces under electrochemical control in acidic chloride solution

Corrosion inhibition effect of benzimidazole and two derivatives on copper in alkaline environments: experimental and theoretical analyses

Corrosion inhibition efficiency and quantum chemical studies of some organic compounds: theoretical evaluation

Chemistry of the interaction between Imidazole derivatives as corrosion inhibitors molecules and copper/brass/zinc surfaces: A DFT, reactive and classical molecular force fields study

Theoretical and electrochemical analysis on inhibition effects of benzotriazole derivatives (un- and methyl) on copper surface

Surface-enhanced Raman Scattering and Cyclic Voltammetry Studies of Synergetic Effects in the Corrosion Inhibition of Copper by Polybenzimidazole and Mercaptobenzimidazole at High Temperature

Understanding corrosion inhibition with van der Waals DFT methods: the case of benzotriazole

The Formation of an Effective Anti-Corrosion Film on Copper Surfaces from 2-Mercaptobenzimidazole Solution

Investigation of Corrosion Inhibitor Adsorption on Mica and Mild Steel Using Electrochemical Atomic Force Microscopy and Molecular Simulations

Synergistic inhibition of azoles compounds on chloride-induced atmospheric corrosion of copper: Experimental and theoretical characterization

Investigation of Inhibition of 2-Mercaptobenzoxazole for Copper Corrosion

Electrochemical and Theoretical Studies of 1-Alkyl-2-substituted Benzimidazoles as Corrosion Inhibitors for Carbon Steel Surface in HCl Medium

Inhibition behavior of new ecological corrosion inhibitors for mild steel, copper and aluminum in acidic environment: Theoretical and experimental investigation

Adsorption of 2-Mercaptobenzothiazole Organic Inhibitor and its Effects on Copper Anodic Oxidation in Alkaline Environment

Benzothiazole derivatives-based supramolecular assemblies as efficient corrosion inhibitors for copper in artificial seawater: Formation, interfacial release and protective mechanisms

Atomic-Level Insights into the Adsorption of Methyl-Substituted Quinoxalinones on Fe(110): A Dispersion-Corrected DFT Analysis

Temporal Aspects of Corrosion Inhibition on Copper, Silver, and Copper-Silver Alloy: An Electrochemical Impedance Spectroscopy Study

Experimental and Density Functional Theory Study of Inhibitors on Cobalt Corrosion for Chemical Mechanical Planarization Process

Atomistic Analysis of Sulphonamides as a Microbial Influenced Corrosion (MIC) Inhibitor