Abstract:The atomic force microscope (AFM) can be used in dynamic tipping mode as an effective lithography technique capable of manufacturing nanometer sized devices on the surface of a silicon wafer with a higher resolution surface characterization. The most difficult challenge in fabrication of nanostructure based on AFM nano-oxidation approach is the way of controlling an electric field between a cantilever probe tip and a silicon wafer. A water bridge builds up between the tip and the wafer, resulting in the oxidation due to the high electric field in the region. A reconstructive AFM system for nano-oxidation with a tapping model, implemented in an air, was developed. The presented AFM implements the increasing of electric field intensity by analyzing the impact voltage from −1 V to −5 V, electric field, and ion concentrations at the ambient/oxide and oxide/silicon interfaces, while the growth of thin oxides assumes a single liquid/silicon interface, which is modeled as an infinitely long conducting plane. Therefore, particle distribution for the surface charge density is generated for topography simulations. Based on the control-parameters, an enhanced electrical field of up to 1010 V/m can be obtained, which provides a powerful support for controllable experimental study of nanostructures fabrication with AFM tip induced local anodic oxidation. This showed the dependence of applied voltage types and various nanostructures and life time of AFM tip, by controlling tip-sample position in nanolithography processes is an important factor for controlling the aspect electric field distribution. And the effect of different parameters on enhancement distribution was performed and analyzed in this paper.

Anodic Oxidation Nano-Fabrication at Different Parameters by AFM

Study on Nanofabrication with Dynamic Electrical-Field-induced Anodic Oxidation

Impact of Various Parameters on Nanostructures Fabrication Mechanism on Silicon Surface with AFM Tip Induced Local Anodic Oxidation

Role of Electric Field Distribution in Local Anodic Oxidation

3-D finite element calculation of electric field enhancement for nanostructures fabrication mechanism on silicon surface with AFM tip induced local anodic oxidation

Characteristics of Local Anodic Oxidation of Silicon Surfaces by AFM and Fabrication of Nanoscale Metrology Standard Sample

Fabrication and Application of Nano-Porous Aluminum

Fabrication of regular nanostructures on the surface of Si by AFM anodic oxidation

Effect of the tip-sample contact force on the nanostructure size fabricated by local oxidation nanolithography.

Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces: Insights from ReaxFF Molecular Dynamics

Preparation of Micro/Nanostructures by AFM Field-induced Oxidation

Effect of the Electric-Field Distribution on the Morphology of Dot-Array Gratings Fabricated by AFM-based Nanolithography

A Novel Atomic Force Microscope Operating in Liquid for in Situ Investigation of Electrochemical Preparation of Porous Alumina.

Experimental Study and Theoretical Analysis of the Nanometre-Scale Line Structure Fabrication by AFM Electric Lithography

Fabrication of in Situ Ultrathin Anodic Aluminum Oxide Layers for Nanostructuring on Silicon Substrate

Local Oxidation of Titanium Thin Films Using an Atomic Force Microscope under Static and Pulsed Voltages

Nano-Scale Sample-Plate Fabrication By Afm-Tip Induced Local Oxidation

A Controllable and Widely Applicable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membrane

Nano-fabrication System Based on Atomic Force Microscopy

A Highly Controllable Electrochemical Anodization Process to Fabricate Porous Anodic Aluminum Oxide Membranes

Oxidation Rate Effect on the Direction of Metal-Assisted Chemical and Electrochemical Etching of Silicon