Research Progress on Subsurface Defects in Fused Silica

JIANG Yong,YUAN Xiaodong,ZU Xiaotao,XIANG Xia,XU Shizhen,ZHANG Chunlai,YIN Wei,CHEN Meng,WANG Chengcheng
DOI: https://doi.org/10.3321/j.issn:1005-023X.2009.13.024
2009-01-01
Abstract:In this paper the quantitative analysis of the relationship between depth distribution and particle size,and surface roughness of subsurface defects(SSD) in fused silica are reviewed.Three kinds of defect-induced damage mechanisms are summarized: Impurity-induced thermal damage,crack-induced electric field enhancement and defect-induced mechanical strength weakening.As two kinds of efficient techniques to control SSD in fused silica,HF et-ching and laser conditioning are also introduced.In addition,the research status,problems and development trend of subsurface defects in fusion silica are concluded.
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