Subsurface Damage Properties of Nano Scratches in Fused Silica Optics

Yaoyu Zhong,Yifan Dai,Feng Shi,Tingting Sui
DOI: https://doi.org/10.13494/j.npe.20160016
2017-01-01
Nanotechnology and Precision Engineering
Abstract:To enhance the laser-induced damage threshold of fused silica optics , the impact of scratches on laser-induced damage is analyzed in this paper.Nano-indentation experiments were carried out to differentiate a variety of plastic-brittle scratches.Then finite difference time domain (FDTD) algorithm is adopted to simulate the modulation of light occurring in scratches of different depths and different width-depth ratios.Finally, the paper carried out R-on-1 laser-induced damage threshold test on typical scratches.Experimental results show that plastic scratches with the depth of 53 nm have little effect on the laser damage, and the scratches in plastic-brittle transition section induce damage with a certain probability.The damage threshold of brittle scratch is far below the threshold of substrate, which is 43.1% of the substrate's.Thus, brittle scratch is an important factor to reduce the laser-induced damage threshold of fused silica optics.The results indicate that the experimental data and the theoretical simulation show a good consistency.
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