Anomalous Negative Bias Temperature Instability Degradation Induced by Source/Drain Bias in Nanoscale Pmos Devices

Baoguang Yan,Jingfeng Yang,Zhiliang Xia,Xiaoyan Liu,Gang Du,Ruqi Han,Jinfeng Kang,C. C. Liao,Zhenghao Gan,Miao Liao,J. P. Wang,Waisum Wong
DOI: https://doi.org/10.1109/tnano.2008.926343
2008-01-01
IEEE Transactions on Nanotechnology
Abstract:The effect of source/drain (S/D) bias on the negative bias temperature instability (NBTI) of pMOSFETs is studied. The anomalously enhanced NBTI under S/D bias conditions is observed, which cannot be explained by the conventional reaction-diffusion model. A new mechanism based on the enhanced interfacial dissociation of equivSi-H bonds induced by the energetic holes (the hole energy Eh is higher than the reaction activation energy Ea of equivSi-H bond dissociation) is proposed to address the observed degradation behaviors. Monte Carlo simulations are used to identify the validity of the new mechanism.
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