Surface Roughness and Resistivity of Au Film on Si-(111) Substrate

W Tang,KW Xu,P Wang,X Li
DOI: https://doi.org/10.1016/s0167-9317(02)00909-7
IF: 2.3
2003-01-01
Microelectronic Engineering
Abstract:Au films were deposited on Si-(111) substrate by magnetron sputtering technique. The structure of the films was characterized by X-ray diffraction (XRD). The resistivity and the surface roughness were measured by four-point probe and atomic force microscopy (AFM). The results showed that Au-(111) was the dominant preferred orientation and the surface roughness and resistivity depended on the deposition temperature. The change of resistivity appeared to be approximately linear with surface roughness.
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