Relationship Between Resistivity of Metallic Film and Its Surface Roughness, Residual Stress

Tang Wu,Deng Longjiang,Xu Kewei,Jian Lu
DOI: https://doi.org/10.3321/j.issn:1002-185x.2008.04.011
2008-01-01
Rare Metal Materials and Engineering
Abstract:Au film was fabricated on Al2O3 substrate by magnetron sputtering. The relationship between resistivity of metallic film and its surface roughness, residual stress was investigated according to experimental results. The results show that the resistivity of the metallic film correlates with surface roughness and residual stress. The increase of resistivity with surface roughness and tensile residual stress can be explained by the strain energy theory. It can be inferred that crystal orientation may be connect with the mechanical behavior and functional property of metallic film.
What problem does this paper attempt to address?