Structural and Infrared Absorption Properties of Self-Organized InGaAs/GaAs Quantum Dots Multilayers

Q. D. Zhuang,J. M. Li,Y. P. Zeng,L. Pan,Y. H. Chen,M. Y. Kong,L. Y. Lin
DOI: https://doi.org/10.1007/s11664-999-0102-2
IF: 2.1
1999-01-01
Journal of Electronic Materials
Abstract:Self-organized InGaAs/GaAs quantum dots (QDs) stacked multilayers have been prepared by solid source molecular beam epitaxy. Cross-sectional transmission electron microscopy shows that the InGaAs QDs are nearly perfectly vertically aligned in the growth direction [100]. The filtering effect on the QDs distribution is found to be the dominant mechanism leading to vertical alignment and a highly uniform size distribution. Moreover, we observe a distinct infrared absorption from the sample in the range of 8.6–10.7 µ m. This indicates the potential of QDs multilayer structure for use as infrared photodetector.
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