Self‐calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry
Ralf D. Geckeler,Andreas Just,Michael Krause,Olaf Schnabel,Ian Lacey,Damon English,Valeriy V. Yashchuk
DOI: https://doi.org/10.1107/s1600577524003552
IF: 2.557
2024-06-06
Journal of Synchrotron Radiation
Abstract:The beam shaping optics of synchrotrons and X‐ray free‐electron lasers are routinely measured using deflectometric profilometers, which use autocollimators to evaluate the surface slope from the displacement of a reticle image on a detector. Here, novel strategies to reduce systematic measurement errors by using a set of overlapping images of the reticle obtained at different positions on the detector, which can reduce the systematic errors by up to a factor of four to five without recourse to external measurements, are discussed.Deflectometric profilometers are used to precisely measure the form of beam shaping optics of synchrotrons and X‐ray free‐electron lasers. They often utilize autocollimators which measure slope by evaluating the displacement of a reticle image on a detector. Based on our privileged access to the raw image data of an autocollimator, novel strategies to reduce the systematic measurement errors by using a set of overlapping images of the reticle obtained at different positions on the detector are discussed. It is demonstrated that imaging properties such as, for example, geometrical distortions and vignetting, can be extracted from this redundant set of images without recourse to external calibration facilities. This approach is based on the fact that the properties of the reticle itself do not change – all changes in the reticle image are due to the imaging process. Firstly, by combining interpolation and correlation, it is possible to determine the shift of a reticle image relative to a reference image with minimal error propagation. Secondly, the intensity of the reticle image is analysed as a function of its position on the CCD and a vignetting correction is calculated. Thirdly, the size of the reticle image is analysed as a function of its position and an imaging distortion correction is derived. It is demonstrated that, for different measurement ranges and aperture diameters of the autocollimator, reductions in the systematic errors of up to a factor of four to five can be achieved without recourse to external measurements.
optics,physics, applied,instruments & instrumentation