Abstract:The beam shaping optics of synchrotrons and X‐ray free‐electron lasers are routinely measured using deflectometric profilometers, which use autocollimators to evaluate the surface slope from the displacement of a reticle image on a detector. Here, novel strategies to reduce systematic measurement errors by using a set of overlapping images of the reticle obtained at different positions on the detector, which can reduce the systematic errors by up to a factor of four to five without recourse to external measurements, are discussed.Deflectometric profilometers are used to precisely measure the form of beam shaping optics of synchrotrons and X‐ray free‐electron lasers. They often utilize autocollimators which measure slope by evaluating the displacement of a reticle image on a detector. Based on our privileged access to the raw image data of an autocollimator, novel strategies to reduce the systematic measurement errors by using a set of overlapping images of the reticle obtained at different positions on the detector are discussed. It is demonstrated that imaging properties such as, for example, geometrical distortions and vignetting, can be extracted from this redundant set of images without recourse to external calibration facilities. This approach is based on the fact that the properties of the reticle itself do not change – all changes in the reticle image are due to the imaging process. Firstly, by combining interpolation and correlation, it is possible to determine the shift of a reticle image relative to a reference image with minimal error propagation. Secondly, the intensity of the reticle image is analysed as a function of its position on the CCD and a vignetting correction is calculated. Thirdly, the size of the reticle image is analysed as a function of its position and an imaging distortion correction is derived. It is demonstrated that, for different measurement ranges and aperture diameters of the autocollimator, reductions in the systematic errors of up to a factor of four to five can be achieved without recourse to external measurements.

Self‐calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry

High-Accuracy Method for Measuring Two-Dimensional Angles of A Linear Guideway

Small Angular Displacement Measurement Based on an Autocollimator and a Common-Path Compensation Principle.

Line Structured Light Calibration System Based on Planar Complementary Target

Calibrate the Non-Orthogonal Error of AFM with Two-Dimensional Self-Traceable Grating.

Self-calibration of in Situ Monoscopic Deflectometric Measurement in Precision Optical Manufacturing.

Multi-pitch Self-Calibration Measurement Using a Nano-Accuracy Surface Profiler for X-ray Mirror Metrology.

Systematic Error Reduction: Non-Tilted Reference Beam Method for Long Trace Profiler

Collimated Phase Measuring Deflectometry

Simplifying the monoscopic deflectometric measurement by extra-facility-free workpiece positioning

Flexible One-Shot Geometric Calibration for Off-Axis Deflectometry.

Improved System Calibration for Specular Surface Measurement by Using Reflections from a Plane Mirror.

An Improved Geometrical Calibration Method for Stereo Deflectometry by Using Speckle Pattern

Calibration of beam position monitors for high energy accelerators based on average trajectories

Further Improvement of Edge Location Accuracy of Charge-Coupled-Device Laser Autocollimators Using Orthogonal Fourier-Mellin Moments

Measuring Parallelism for Two Thin Parallel Beams Based on Autocollimation Principle

On-Machine Calibration Method for in Situ Stereo Deflectometry System

Scanning Beam Collimation Method for Measuring Dynamic Angle Variations Using an Acousto‐optic Deflector

Precision Roll Angle Measurement System Basedon Autocollimation

Extra-detection-free monoscopic deflectometry for the in situ measurement of freeform specular surfaces.

Correction of Aberration-Induced Phase Errors in Phase Measuring Deflectometry