Off- Axis Micro- Displacement Measurement Based on Elliptic Spot

LIANG Yi-yong,SUN Rong,YANG Guo-guang
DOI: https://doi.org/10.3321/j.issn:1000-1158.2005.02.009
2005-01-01
Abstract:An optical micro-displacement measurement method based on elliptic spot and off-axis principle is proposed. It is found by simulation analysis that the elliptic spot affects detector performance in linearity, sensitivity and dynamic range of the detector. Applied circular gratings are fabricated in laser direct writer according to this metrology principle, and furthermore, it shows the laser diode may replace traditional He-Ne laser and the spot correction is not necessary.
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