Abstract:A 61-MHz Pierce oscillator constructed in 0.35-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> CMOS technology and referenced to a polysilicon surface-micromachined capacitive-gap-transduced wine-glass disk resonator has achieved phase noise marks of −119 dBc/Hz at 1-kHz offset and −139 dBc/Hz at far-from-carrier offsets. When divided down to 13 MHz, this corresponds to −132 dBc/Hz at 1-kHz offset from the carrier and −152 dBc/Hz far-from-carrier, sufficient for mobile phone reference oscillator applications, using a single MEMS resonator, i.e., without the need to array multiple resonators. Key to achieving these marks is a Pierce-based circuit design that harnesses a MEMS-enabled input-to-output shunt capacitance more than <inline-formula> <tex-math notation="LaTeX">$100\times $ </tex-math></inline-formula> smaller than exhibited by macroscopic quartz crystals to enable enough negative resistance to instigate and sustain oscillation while consuming only <inline-formula> <tex-math notation="LaTeX">$78~\mu \text{W}$ </tex-math></inline-formula> of power—a reduction of <inline-formula> <tex-math notation="LaTeX">$\sim 4.5\times $ </tex-math></inline-formula> over previous work. Increasing the bias voltage of the resonator by 1.25 V further reduces power consumption to <inline-formula> <tex-math notation="LaTeX">$43~\mu \text{W}$ </tex-math></inline-formula> at the cost of only a few decibels in far-from-carrier phase noise. This oscillator achieves a 1-kHz-offset figure of merit (FOM) of −231 dB, which is now the best among published chip-scale oscillators to date. A complete linear circuit analysis quantifies the influence of resonator input-to-output shunt capacitance on power consumption and predicts further reductions in power consumption via reduction of electrode-to-resonator transducer gaps and bond pad sizes. The demonstrated phase noise and power consumption posted by this tiny MEMS-based oscillator are attractive as potential enablers for low-power “set-and-forget” autonomous sensor networks and embedded radios.

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